Introduction

It is our pleasure to invite you to participate in the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), which will be organised on-line from 12th to 15th April 2021. It is the purpose of the UCPSS Symposium to increase the level of understanding on ultra-clean processing technology and contamination control in all steps of the IC-production, PV manufacturing and bioelectronics.
The symposium consists of invited presentations, as well as selected contributed presentations and posters.
This symposium is a world class forum in the area of wafer cleaning, clean processing and related metrology and presents an excellent opportunity to give exposure to your company.